Integrated circuit fault location detection system using SEM semiconductor test system

摘要

The circuit fault locator delivers a stop signal to a test system using a charged particle e.g. electron beam, as soon as a connection of the IC system is found, whose output signal differs from an expected value. The test system with the beam measures the amount of sec. electrons, produced from each point of the IC system irradiated by the beam. An electron distribution in the IC is represented as a potential difference, by processing the amount of sec. electrons. The potential difference between that of a known good IC and the measured IC is obtained in order to indicate faults, using a controller which stored circuit network, mask layout and input-output data lists.