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发明名称
Konstruktion eines heissen rezirkulierenden chemischen Bades
摘要
申请公布号
DE69121071(D1)
申请公布日期
1996.08.29
申请号
DE19916021071
申请日期
1991.09.13
申请人
IMTEC PRODUCTS, INC., SUNNYVALE, CALIF., US
发明人
BERMAN, ALLAN, SUNNYVALE, CALIFORNIA 94089, US
分类号
B05C3/02;H01L21/00;(IPC1-7):H01L21/00
主分类号
B05C3/02
代理机构
代理人
主权项
地址
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