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发明名称
CLEANING DEVICE
摘要
申请公布号
JPH08215652(A)
申请公布日期
1996.08.27
申请号
JP19950046385
申请日期
1995.02.10
申请人
NISSHO IWAI MECHATRONICS KK
发明人
HOSHINO MASAHIRO;NAKAGUCHI MASAYUKI
分类号
B08B3/10;H01L21/304;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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