| 摘要 |
PURPOSE: To easily obtain elastic modulus or its ratio by measuring the distortion of a sample from the X-ray diffraction result of a reference grating surface, calculating the diffraction angle of another grating surface achieving the same effective penetration depth as that of X-ray, and measuring the distortion of the grating surface from the diffraction angle. CONSTITUTION: A grating which becomes a reference at a diffraction angle ofθa which becomes a reference with an inclination angleΨ=0 is set, and the X-ray elastic modulus in that case is set to A. Then, in the grating surface A which becomes a reference, an effective intrusion depth te at a diffraction angle ofθ=θa is obtained. Then, a distortionεa of a sample is obtained at an incident angle ofθa for the grating surface A. Then, other conditions where the depth te has the same value are obtained. In this manner, the elastic modulus A is obtained. When the value of the constant A is unknown and is set to 1, the ratio for the modulus A is obtained, thus easily and rapidly the modulus A (or its ratio) in each lattice surface is obtained, and hence easily and rapidly the stress of the sample may be obtained.
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