LASER PROCESSING DEVICE AND METHOD THEREFOR

摘要

PURPOSE: To clean both of an optical window and an object to be irradiated without degrading material characteristics. CONSTITUTION: This laser processing device for irradiating a circuit board 6 with laser beam is provided with a vacuum chamber 1, a fixing pallet 5, a laser irradiation part 3, an optical window 4 and a high frequency electrode 7. The vacuum chamber 1 is kept in a prescribed degree of vacuum. The fixing pallet 5 is arranged inside the vacuum chamber 1, and holds the circuit board 6. The laser irradiation part 3 is arranged outside the vacuum chamber 1 to irradiate the circuit board 6 held by the fixing pallet 5 with the laser beam. The optical window 4 is provided on the wall face of the vacuum chamber 1 to introduce the laser beam emitted from the laser irradiation part 3. The high frequency electrode 7 generates the plasma between the optical window 4 and the fixing pallet 5 to clean the circuit board 6 and the optical window 4.