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发明名称
METHOD FOR REMOVING METALLIC IONS IN SOLUTION AND APPARATUS THEREFOR
摘要
申请公布号
JPH08197059(A)
申请公布日期
1996.08.06
申请号
JP19950031462
申请日期
1995.01.27
申请人
KAIJO CORP
发明人
MURAO HIROAKI
分类号
C02F1/461;C23F1/46;C23G1/36;H01L21/304;H01L21/3063;(IPC1-7):C02F1/461;H01L21/306
主分类号
C02F1/461
代理机构
代理人
主权项
地址
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