| 摘要 |
<p>PURPOSE: To provide a polishing apparatus which can finish the whole surface of an object to be polished into a highly flattened surface. CONSTITUTION: The polishing apparatus is featured in that the apparatus has a turn table 1 whose upper surface is covered with polishing cloth 3 and a top ring 4, where these turn table 1 and the ring 4 turn with different speed respectively, and an object 5 to be polished is held therebetween so that the surface of the object can be polished into a flat and mirror-like surface. Then, a plurality of nozzles 10A, 10B... 10G are arranged above the table 1 and abrasive solutions with different concentrations are supplied on the polishing cloth 3 spread on the turn table 1.</p> |
