| 摘要 |
PURPOSE: To obtain a quality control system in which the set condition of every production apparatus is monitored on the basis of a set reference value, for every production apparatus, decided in advance to produce a semiconductor device, whose operation is not permitted when the set condition does not match, which urges the maintenance of an installation and which prevents a defective product from being produced. CONSTITUTION: A quality control system is constituted of production apparatuses 2a to 2n which execute a prescribed working treatment to a semiconductor device according to a production process, of a central control unit 1 by which the operation of the respective production apparatuses is controlled in a centralized manner via communication lines 3a to 3n with the respective production apparatuses 2 and of a terminal 4 to which data and an instruction are input by an operator. When a condition which is set for every production apparatus does not match a preset production standard, the quality control system in production of the semiconductor device does not permit, or stops, an operation for the production, or gives a warning or urges the reset of the condition for every production apparatus and a maintenance operation so as to prevent a defective product from being produced. |
