发明名称 INTERPOSER AND INTERPOSER PRODUCING METHOD
摘要 An interposer producing method comprises the steps of forming a seed layer (14) in the opening in a through-hole (13) on the back (12) side of a base plate (10), forming a plating electrode layer (15) on the basis of the seed layer (14), and forming a plated layer (16) on the face (11) side of the base plate (10) to fill the through-hole (13). As a result, it is possible to provide an interposer producing method in which the production process is easy and no blowhole is produced in the through-hole.
申请公布号 KR20060060722(A) 申请公布日期 2006.06.05
申请号 KR20067004600 申请日期 2006.03.06
申请人 TOKYO ELECTRON LIMITED 发明人 KAGAWA KENICHI;HOSHINO TOMOHISA;YAKABE MASAMI
分类号 H01L23/32 主分类号 H01L23/32
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