发明名称 TFT-LCD ARRAY SUBSTRATE AND MANUFACTURING METHOD THEREOF
摘要 A pixel unit of TFT-LCD array substrate and a manufacturing method thereof is disclosed. In the manufacturing method, besides a first insulating layer and a passivation layer, a second insulating layer is adopted to cover the gate island, and forms an opening on the gate island to expose the channel region, the source region and the drain region of the TFT. A gray tone mask and a photoresist lifting-off process are utilized to perform patterning, so that the TFT-LCD array substrate can be achieved with just three masks.
申请公布号 US2008030639(A1) 申请公布日期 2008.02.07
申请号 US20070834118 申请日期 2007.08.06
申请人 QIU HAIJUN;WANG ZHANGTAO;CHEN XU;MIN TAE YUP 发明人 QIU HAIJUN;WANG ZHANGTAO;CHEN XU;MIN TAE YUP
分类号 G02F1/136;H01L21/77 主分类号 G02F1/136
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