LAMINATING METHOD FOR DRY RESIST FILM

摘要

PURPOSE: To improve the mounting state of a thick resist film and to prevent fuzzing of a resist layer after peeling of a base film by cooling a base plate to which the dry resist film is thermally contact-bonded and cutting the resist film on the base plate and thereafter reheating it and removing the projected film. CONSTITUTION: A dry resist film 1 is thermally contact-bonded together with a base plate 2 by heated laminate rollers 5, 6 and sent to the cooling part of the base plate by conveyance rollers 4 and cooled by the cooling means 7 of the base plate. The cooled base plate 2 is sent to the cutting part of a film on the base plate and the dry resin film 1 connecting the mutual base plates 2 is cut on the respective base plates 2. The base plate 2 to which the dry resist film 1 is bonded is sent to a film-removing part and reheated by heating rolls 18. The dry resist film 1 is removed from the reheated base plate 2 by a film peeling means 14.