发明名称 |
Vacuum device |
摘要 |
A vacuum device comprises a plurality of cryopumps (10) connected with one or a plurality of vacuum chambers. The cryopumps (10) are connected via media supply conduits (12) and media return conduits (14) with a compressor (16). An adjusting device (18) is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps (10) comprise a temperature measuring device. The temperature measuring device and the adjusting device (18) are connected with a controller (28). To allow the desired amount of media to be fed to the cryopumps (10), the adjusting device (18) comprises a throttle (24) in a media supply conduit (12) and a controllable valve in a throttle bypass conduit (22).
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申请公布号 |
US7481066(B2) |
申请公布日期 |
2009.01.27 |
申请号 |
US20060568549 |
申请日期 |
2006.02.17 |
申请人 |
OERLIKON LEYBOLD VACUUM GMBH |
发明人 |
SCHILLER DIRK;DIETZ HOLGER;WALTER GERHARD WILHELM |
分类号 |
B01D8/00;F04B37/08;F04B41/06;F25B9/10;F25B9/14;F25B41/04 |
主分类号 |
B01D8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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