TITANIUM-NITRILE-COATING COMPOSITION,COATED ARTICLE AND PRODUCTION

摘要

The present invention is directed to polycrystalline titanium nitride and zirconium nitride coating compositions and coated articles with a I(111)/I(200) x-ray diffraction intensity ratio of at least about 75 for the titanium nitride composition and at least about 15 for the zirconium nitride composition and to a method of forming a highly oriented polycrystalline titanium nitride or zirconium nitride coating composition with a high I(111)/I(200) x-ray diffraction intensity ratio. This invention also concerns polycrystalline titanium nitride and zirconium nitride coating compositions and coated articles of the type described with an interplanar spacing, d111, of 2.460 Angstroms or less for TiN and an interplanar spacing, d111, of 2.660 Angstroms or less for ZrN and to methods for producing same. The composition is deposited upon a substrate in an evacuated chamber from a titanium or zirconium cathode source surrounded by an elongated member which overhangs the cathode to form a cathode chamber. Nitrogen gas is passed through the cathode chamber into the vacuum chamber.