| 摘要 |
The present invention relates to a liquid spray head provided with a plurality of liquid spray elements arranged in an array on a substrate. Each element comprises a chamber arranged on the substrate for holding a liquid to be sprayed, a nozzle, a liquid path for communication with the nozzle and the chamber, a diaphragm arranged on the liquid chamber, a piezoelectric element comprising a lower electrode arranged on the diaphragm, a piezoelectric film comprising a lead zirconate titanate film arranged on the lower electrode and an upper electrode arranged on the piezoelectric film. Energy is applied to the piezoelectric element so as to bend the diaphragm for deforming a volume of the liquid chambers to spray the liquid. The liquid chambers have a pitch equal to the pitch of the nozzles, and the following relationships are satisfied: 1) 10</=W/L</=150 2) tp>/=tv 3) 0.012</=(tp+tv)/L<0.08 where L is a length of the liquid chambers in an array direction, W is a length of the liquid chambers in a depth direction, tp is a thickness of the lead zirconate titanate film and tv is a thickness of the diaphragms.
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