| 摘要 |
<p>PURPOSE: To enable highly-accurate measurement without causing contact trouble even if the probe face inclines by finding the quantity of slippage of the position of an electrode after paralleling the face of a board face with the probe face, and shifting the stage by the quantity of slippage so as to position them. CONSTITUTION: The first image pickup means 18 seeks the inclination of the probe face 19 made of the tips of plural probes 4, and the second image pickup means 22 seeks the inclination of the board face, and the board face is set in parallel with the probe face 19, and the probe face 19 is brought into contact with the probe face 19 so as to inspect the electric property of the board 1. In such a probe device, an adjusting means, which sets the board face to the probe face 19, is provided. Furthermore, the second image pickup means 22 picks up the image of the electrode position of the board 1 and picks up the images of the electrode before paralleling the board face and the image of the electrode position after paralleling so as to find the quantity of slippage, and further this is provided with a positioning means which shifts the stage 15 by the quantity of slippage so as to align them.</p> |
