| 摘要 |
PURPOSE: To provide a laser plasma light source in which the adhesion of an undesired target material to a laser incident optical system can be effectively prevented. CONSTITUTION: In a laser plasma light source for converging a laser beam 101 onto a target 105 through a laser incident optical system to generate a plasma, and generating an X-ray from the plasma, the optical element closest to the target 105 of the laser incident optical system is formed of a reflecting mirror 102. The reflecting mirror 102 is arranged within a vacuum vessel 104 together with the target 105. |
