| 摘要 |
PURPOSE:To obtain a semiconductor acceleration sensor which can be miniatur ized and made to have high sensitivity and high performance. CONSTITUTION:A semiconductor acceleration sensor has a mass part 16 provided on a semiconductor substrate 12, an elastic part 14 of small thickness provided around the mass part 16 and a plurality of couples of piezo-resistors 17 provided on the elastic part 14, and the mass part 16 has such a construction as to be connected to the elastic part 14 through a connecting part 15 which has a smaller area than the area of the upper end of the part 16. The aforesaid elastic part 14 may be formed also as a beam part provided between a plurality of through holes. Since the elastic part or the beam part having an enlarged width can be formed on the semiconductor substrate and it is possible to improve sharply the sensitivity as the sensor and to prepare the sensor by an ordinary semiconductor manufacturing process, the semiconductor acceleration sensor being subminiaturized can be realized and thus the semiconductor acceleration sensor which can be miniaturized and made to have high sensitivity and high performance can be obtained. |
