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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH08153861(A)
申请公布日期
1996.06.11
申请号
JP19940293572
申请日期
1994.11.29
申请人
HITACHI LTD
发明人
SHIMIZU TAKAYUKI
分类号
H01L27/118;H01L21/82;(IPC1-7):H01L27/118
主分类号
H01L27/118
代理机构
代理人
主权项
地址
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