| 摘要 |
PURPOSE: To uniformly form circuits on the surface of a solid board, by adjusting laser light irradiation in the manner in which the laser light energy absorbed by each surface of a solid of the surface of a solid board becomes almost uniform, and irradiating the surface of the solid board with the laser light. CONSTITUTION: Energy of leaser light L absorbed by the vertical surface part 4b and the slant surface part 4a of a solid board 1 is made almost uniform. As a means for changing the energy density of the laser light L which which the vertical surface part 4b and the slant surface part 4a are irradiated, a glass mask 10 composed of synthetic quartz wherein the transmittance to the laser light L is changed according to irradiation positions is used. That is, out of the mask 10, a transmission part 15a for transmitting the laser light with which the slant surface part 4a is irradiated is formed so as to transmit 100% of the laser light L. A part 15b for transmitting the laser light with which the vertical surface part 4b is irradiated is formed so as to transmit 50% of the laser light L. |
