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发明名称
OPTICAL DISPLACEMENT MEASURING DEVICE
摘要
申请公布号
JPH08145726(A)
申请公布日期
1996.06.07
申请号
JP19940308123
申请日期
1994.11.16
申请人
CANON INC
发明人
KANEDA YASUSHI;ISHIZUKA AKIRA
分类号
G01D5/38;G01B11/00;G01D5/36;(IPC1-7):G01D5/38
主分类号
G01D5/38
代理机构
代理人
主权项
地址
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