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发明名称
PROBE UNIT
摘要
申请公布号
JPH08139142(A)
申请公布日期
1996.05.31
申请号
JP19940300260
申请日期
1994.11.09
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON YAMANASHI KK
发明人
SANO KUNIO
分类号
G01R1/073;G01R1/067;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
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