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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08139073(A)
申请公布日期
1996.05.31
申请号
JP19940273280
申请日期
1994.11.08
申请人
FUJITSU LTD
发明人
ARAYA TATSUJI
分类号
H01L21/302;H01L21/027;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
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