发明名称 |
Susceptor and baffle therefor |
摘要 |
A susceptor for holding semiconductor wafers in a barrel reactor for chemical vapor deposition of material on the wafers having a baffle for reducing the amount of material deposited at the bottom of the lowest wafers held in the susceptor. The baffle includes a plate mounted on the bottom of the susceptor and a deflector for each wall of the susceptor. The deflectors each have the shape of a chordal section of a cylinder and are mounted on the plate against a respective wall of the susceptor below the lowest wafer-holding recess on that wall of the susceptor.
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申请公布号 |
US5518549(A) |
申请公布日期 |
1996.05.21 |
申请号 |
US19950423363 |
申请日期 |
1995.04.18 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
HELLWIG, LANCE G. |
分类号 |
C30B25/12;C23C16/458;C30B29/06;H01L21/687;(IPC1-7):C23C16/00 |
主分类号 |
C30B25/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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