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发明名称
SEMICONDUCTOR INSPECTING APPARATUS
摘要
申请公布号
JPH08129055(A)
申请公布日期
1996.05.21
申请号
JP19940267426
申请日期
1994.10.31
申请人
HITACHI LTD
发明人
HIRAISHI AKIHIKO
分类号
G01R31/316;H03M1/10;(IPC1-7):G01R31/316
主分类号
G01R31/316
代理机构
代理人
主权项
地址
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