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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH08125013(A)
申请公布日期
1996.05.17
申请号
JP19940255093
申请日期
1994.10.20
申请人
KAWASAKI STEEL CORP
发明人
ISHIHARA KANJI
分类号
H01L21/28;H01L21/768;H01L23/522;(IPC1-7):H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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