摘要 |
PURPOSE: To easily and simply obtain the hologram, which is related with the thin film sample surface structure, by using an X-ray source at a scale of the laboratory level. CONSTITUTION: A X-ray source 14 for emitting the X-ray, two monochromators 16, which are formed by the (+, +) arrangement of the analyzing crystal, to which channel cut is performed, and for analyzing the X-ray entered from the X-ray source 14, a pin hole 17 for widening the X-ray entered from the monochromator 16, and a two-dimensional detector 20 for continuously recording the hologram obtained by reflecting the single color X-ray, which is widened by the pin hole 17, with the surface of the thin film sample 18 are provided inside of a vacuum chamber 12, and the simple X-ray source 14 is used for obtaining the hologram in the two-dimensional detector 20. |