发明名称 X-RAY EVALUATING DEVICE
摘要 PURPOSE: To easily and simply obtain the hologram, which is related with the thin film sample surface structure, by using an X-ray source at a scale of the laboratory level. CONSTITUTION: A X-ray source 14 for emitting the X-ray, two monochromators 16, which are formed by the (+, +) arrangement of the analyzing crystal, to which channel cut is performed, and for analyzing the X-ray entered from the X-ray source 14, a pin hole 17 for widening the X-ray entered from the monochromator 16, and a two-dimensional detector 20 for continuously recording the hologram obtained by reflecting the single color X-ray, which is widened by the pin hole 17, with the surface of the thin film sample 18 are provided inside of a vacuum chamber 12, and the simple X-ray source 14 is used for obtaining the hologram in the two-dimensional detector 20.
申请公布号 JPH08114561(A) 申请公布日期 1996.05.07
申请号 JP19940253145 申请日期 1994.10.19
申请人 RICOH CO LTD 发明人 KATSURAGAWA TADAO
分类号 G01N23/04;G01N23/207;G03H5/00 主分类号 G01N23/04
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