SUBSTRATE POSITION DETECTING DEVICE

摘要

PURPOSE: To enable a substrate position detecting device to rightly recognize positioning marks on one substrate even when the states of the marks change. CONSTITUTION: An A/D-converting section 34 executes A/D conversion and a discriminating and processing section 35 executes discrimination and processing based on values written in a level memory 36 and gain memory 37 at the position of each mark at which the image of the mark position number of discriminating mark data stored in a RAM 26 is picked up.