发明名称 PRODUCING DEVICE FOR METAL THIN FILM AND PRODUCTION OF METAL THIN FILM
摘要 PURPOSE: To improve the travelling stability by using a container for a metal material, touching means to fuse the metal material in the container, and ultrasonic spraying device to spray the particles of the fused metal material with ultrasonic waves. CONSTITUTION: A metal thin film type magnetic recording medium is produced by the following method. Fine particles of Al are sprayed from a spray nozzle 6 and deposited on a supporting body 4 comprising a PET film by operating an ultrasonic oscillator 7 connected to the spray nozzle 6, for example, under 3kW output and 25kHz frequency coditions. Then a take-up roll 3b is taken out and attached to the holder of a supply roll in a conventional thin film forming device. The vacuum chamber of the device is evacuated to about 10<-5> to 10<-6> Torr vacuum degree and a magnetic metal (80%Co-20%Ni) is vaporized and obliquely deposited by 0.04 to 1&mu;m thickness on the surface opposite the surface where the Al film is formed in the PET film.
申请公布号 JPH08102059(A) 申请公布日期 1996.04.16
申请号 JP19940236660 申请日期 1994.09.30
申请人 KAO CORP 发明人 SHIGA AKIRA;KITAORI NORIYUKI;YOSHIDA OSAMU;MIZUNOYA HIROHIDE;WAKABAYASHI SHIGEMI
分类号 C23C4/12;G11B5/84 主分类号 C23C4/12
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