| 摘要 |
PURPOSE: To accurately recognize the feature of an object and to improve inspection accuracy. CONSTITUTION: Plural small areas A-C are set on an model image 15 obtained by picking up the image of a nondefective item and images inside the respective small areas are registered as partial model images 15A-15C. Three small areas are set also on the image of the object at the time of an inspection and density correlation values with the corresponding partial model images are calculated for the images inside the respective small areas. When a minimum value among the respective calculated correlation values becomes lower than a prescribed threshold value, it is judged that a defect is generated in a part equivalent to the area. |
