| 摘要 |
PURPOSE: To provide a disk valve obtaining a good slide characteristic over a long period without worsening sealability further without wearing both valve elements, by forming in a slide surface a bed layer formed of soft carbon film, also forming on the bed layer the uppermost layer formed of herd carbon film. CONSTITUTION: A soft carbon film 34, having no peak at Raman spectral analysis time, is a carbon film emitting fluorescence with compressive stress almost not residual in the film, or is a carbon film having 100 to 500kg/mm<2> knoop hardness, and a hard carbon film 35 is a carbon film having a peak at Raman spectral analysis time with compressive stress residual in the film, or is a carbon film having knoop hardness larger than 600kg/mm<2> . Film thickness of a bed layer is 0.2 to 1.6μm, further with a film thickness of a carbon film total unit in a 0.6 to 2.6μm range. By the above constitution, separating a carbon film 33 from a disk base unit 37 and generating a crack are prevented.
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