| 摘要 |
PURPOSE: To provide a color filter which is smooth without any projection in a colored layer overlapping part and has an excellent liquid crystal display property by carrying out the formation of a black matrix layer in which three colors overlap with each other and the formation of a filter colored layer at the same time while using a photomask provided with a half toned mask part, in a light shielding part of the color filter. CONSTITUTION: In a photomask 1 used in this constitution, a part, (a) to become a pattern of a colored layer 6 is a transparent opening part 2, a part (b) to become a black matrix is a half toned half part 3, and a part to become a pattern of a colored layer 6 for other colors is an opaque light shielding part 4. On a glass substrate 5, spin coating is carried out over the whole surface while using photosensitive colored resist 6', and prebaking is carried out. The photomask 1 is arranged on the resist formation face, ultraviolet exposure and development are carried out, and postbaking is performed. These processes are repeated, and patterns for red R, green G, and blue B are formed in order. In this way, a black matrix layer 7 which is overlap of three colors can be formed at the same time. |
