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发明名称
Verfahren und Vorrichtung zum Beschichten von Substraten mit einem Film
摘要
申请公布号
DE4327427(C2)
申请公布日期
1996.04.11
申请号
DE19934327427
申请日期
1993.08.14
申请人
SCHRECKENBACH, ANDREAS, 25557 HANERAU-HADEMARSCHEN, DE
发明人
分类号
B05C11/08;G03F7/16;(IPC1-7):B05C11/08;B05C5/00;B05C11/11;C08J5/18
主分类号
B05C11/08
代理机构
代理人
主权项
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