Method for fabricating pillar bipolar transistor

摘要

Disclosed is a pillar bipolar transistor which has a bidirectional operation characteristic and in which a parasitic junction capacitance of a base electrode, and a method for fabricating the transistor comprises etching a substrate using a first patterned insulating layer as a mask to form first and second pillarss separated by a trench therein; injecting an impurity using a mask to form a collector under the first and second pillars and in the second pillar; depositing a first oxide layer and a first polysilicon layer thereon; polishing the first polysilicon layer using the first oxide layer as a polishing stopper; removing a portion of the first polysilicon layer and a portion of the first oxide layer to define an extrinsic base; etching the oxide layer formed on both sides of the first pillar to a predetermined depth to define a connecting portion and forming a buried polysilicon therein to form the connecting portion; depositing a second oxide layer and a second polysilicon layer thereon; polishing the second polysilicon layer using the second oxide layer as a polishing stopper; removing only the second oxide layer formed upward the first pillar to expose a surface of the first pillar; injecting an impurity in the first pillar to form a base at a center portion thereof; injecting an impurity to form an emitter at an upper portion of the first pillar; depositing a third polysilicon layer on the emitter, the third polysilicon layer being formed wider than the emitter; and forming self-aligned contact holes to form electrodes through the contact holes.