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发明名称
PLASMA ETCHING METHOD
摘要
申请公布号
JPH0892768(A)
申请公布日期
1996.04.09
申请号
JP19940229216
申请日期
1994.09.26
申请人
HITACHI LTD
发明人
TAGO KAZUATSU;KAZUMI HIDEYUKI;HAMAZAKI RYOJI
分类号
C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00;H01L21/306
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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