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发明名称
Dünne Filmbeschichtungen, hergestellt unter Verwendung von plasmaaktivierter chemischer Dampfphasen-Abscheidung von fluorierten Cyclosiloxanen.
摘要
申请公布号
DE69204400(T2)
申请公布日期
1996.04.04
申请号
DE19926004400T
申请日期
1992.07.16
申请人
DOW CORNING CORP., MIDLAND, MICH., US
发明人
D'AGOSTINO, RICCARDO, I-70121 BARI, IT;CAPORICCIO, GERARDO, I-20149 MILANO, IT;FAVIA, PIETRO, I-70123 BARI, IT
分类号
C23C16/30;C09D183/04;C09D183/08;C23C16/40;C23C16/50;(IPC1-7):C23C16/30
主分类号
C23C16/30
代理机构
代理人
主权项
地址
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