| 摘要 |
PURPOSE: To form the smooth surface for the inner surface of a concave part, to make the orientation of the C axis of a superconductor thin film formed on the smooth surface excellent, and to improve the characteristics by forming the concave part of the surface of a substrate by cutting. CONSTITUTION: The blade chip of a bite 18 is applied on the surface of a substrate 11 and moved in the direction orthogonal to the axial direction of the substrate 11. Thus, a concave part 12 is formed in the surface of the substrate 11. A bent part 13 is formed at inclination angle (1) at the bottom surface of the concave part 12. A curved part 14 is formed at an inclination angleβat one-end part of the concave part 12 in the axial direction. A curved part 15 is formed at an inclination angleγat the other end part. At this time, the inner surface of the concave part becomes the smooth surface, and the orientation of the C axis of a superconducting thin film formed at this part becomes excellent. Thus, the characteristics of a superconducting element are improved. Furthermore, the machining for cutting is quickly performed, and the productivity can be improved.
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