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发明名称
Semiconductor sensor with vibrating element
摘要
申请公布号
EP0400939(B1)
申请公布日期
1996.03.27
申请号
EP19900305777
申请日期
1990.05.29
申请人
SOLARTRON GROUP LIMITED
发明人
BARTH, PHILLIP W.;PETERSEN, KURT E.;MALLON, JOSEPH R.
分类号
G01L1/10;G01L9/00;H01L29/84;(IPC1-7):G01L9/00;G01D5/12
主分类号
G01L1/10
代理机构
代理人
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