| 摘要 |
<p>PURPOSE: To provide an electron emitting element exhibiting a uniform electron emission characteristic without involving any complicated process by performing a film formation process while the control is made on the basis of the measuring result of the film forming condition between element electrodes which are positioned opposingly. CONSTITUTION: A film forming means 104 is operated for a certain time and stopped for a certain period, and an element voltage is impressed by a power supply 108b between element electrodes 2, 2', and measurement of the grid current is made by an ammeter 109a. When the measured grid current remains not attaining zero or any specified value, the film forming means 104 is again operated through a controller 110, and the measuring is repeated in the same manner. When the measured grid current attains the specified value, the film formation process is ended. This yields a high reliability element which exhibits a good electron emitting characteristic.</p> |
