ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, IMAGE FORMING DEVICE USING THE SOURCE, AND THEIR MANUFACTURE

摘要

PURPOSE:To establish a manufacturing method for surface conduction type electron emitting elements for use as an electron source of an image forming device, etc. CONSTITUTION:An electron emitting element of surface conduction type is structured so that an electron emission part 2 is provided in a conductive thin film 3 which puts element electrodes 4, 5 in communication with each other. In the manufacture of such elements, the process for pattern formation on the thin film 3 produces an organic metal thin film 31. The first region 35 on the organic metal thin film 31 is irradiated with ultraviolet rays 33 so that the region has a different composition from the second region 36 which remains out of ultraviolet irradiation. Then only the first region 35 is left according to the selectivity among the first region 35 and second region 36. This simplifies the manufacturing processes to a great extent.