| 摘要 |
A monolithic capacitive differential pressure transducer (68, 156, 170) is shown composed of ceramic material having first and second cavities formed adjacent to opposed face surfaces to form first and second flexible diaphragms (70, 72; 110, 140; 172, 174) and a motion transfer pin (74, 124/130, 202) attached to and extending between the diaphragms. Capacitor plates are disposed on opposed rigid platform members (76, 78; 100, 126; 184, 194). Component parts are first pressed from ceramic powder and assembled into a unit using one of several methods including a selected amount of pressure to press them together or using a combination of low pressure along with raising the temperature of the material to soften the binder in the ceramic material at surfaces of the parts which are to be joined together. Selected gaps, both along the x-y direction and along the z direction may be obtained using consumable spacer material which is sublimated in a debinderization cycle prior to sintering of the unit to form a monolithic body.
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