Solid annular gas discharge electrode,申请号IL19950115601-传众专利搜索

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发明名称	Solid annular gas discharge electrode
摘要
申请公布号	IL115601(D0)	申请公布日期	1996.01.19
申请号	IL19950115601	申请日期	1995.10.12
申请人	HUGHES AIRCRAFT COMPANY	发明人
分类号	C23F4/00;C23C16/455;H01J37/32;H01L21/302;H01L21/3065;(IPC1-7):H01J	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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