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发明名称
PATTERN FORMATION METHOD
摘要
申请公布号
JPH088171(A)
申请公布日期
1996.01.12
申请号
JP19940156405
申请日期
1994.06.16
申请人
CASIO COMPUT CO LTD
发明人
KOTANI SHOICHI
分类号
G02F1/1333;H01B13/00;H01L21/027;H01L21/3213;H05K3/06;(IPC1-7):H01L21/027;G02F1/133;H01L21/321
主分类号
G02F1/1333
代理机构
代理人
主权项
地址
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