| 摘要 |
PURPOSE: To produce an active electrode area having the uniform plazma characteristics on a surface of an electrode, by making a length of a separative transmission line which connects a matching network and plural powered electrodes, almost equal to that of a quater wavelength transmission line. CONSTITUTION: In the case of four-electrode, the output of a matching network 102 fed by an RF power source 100, is fed to the quater wavelength coaxial lines 105-108 which distribute the power to the segmentized electrodes of the sections 111-114 of an earthed plazma reactor chamber 110. The electrodes are separated inside the reactor, at an interval 109 less than an interval of a dark space. A non-electrically conductive sheet 115 insulates the electrodes from a chamber wall, and supports the same, one edge of a shield of the coaxial lines is earthed on the chamber, and the other edge of the same is connected to a housing of the network 102. The operating characteristic of the electrode construction is that the uniform plazma is generated throughout the whole connected surface area of four electrode segments.
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