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发明名称
WAFER CONVEYING PLATE
摘要
申请公布号
JPH07335714(A)
申请公布日期
1995.12.22
申请号
JP19940151608
申请日期
1994.06.09
申请人
KOKUSAI ELECTRIC CO LTD
发明人
KAIHATSU HIDEKI;TOMEZUKA KOJI;SHINO KAZUHIRO
分类号
B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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