| 摘要 |
<p>The invention is directed to improving a quality of surface treatment and an efficiency of operation. A gas (6) which is to be jetted against a surface of an object being processed (15) is heated and made into plasma by a heating means (5) to be put into a highly reactant condition (excited condition, active condition). The gas which has been heated and made into plasma is subjected to adiabatic expansion by a rubber nozzle (1) to acquire a greater speed than the sound speed. The gas (7) at a greater speed than the sound speed is jetted against a surface of the object being processed (15). Thus the gas (7) which has been heated and made into plasma to be put into a highly reactant condition reaches the object being processed (15), which is an object for jetting, at a supersonic speed in a short period of time.</p> |
