HORIZONTAL VAPOR GROWTH DEVICE

摘要

PURPOSE:To prevent the surface of a substrate from being contaminated in the case where the substrate is exchanged in a horizontal MOCVD device. CONSTITUTION:An opening 21a is provided in a part of the lower tube wall of a lateral reaction tube 21 of a horizontal MOCVD device and a susceptor 23 is constituted detachably to this opening 21a. The susceptor 23 is constituted integrally with a heating use heater 29. The susceptor 23 and the heater 29 are mounted on a susceptor pedestal 33 movable in the vertical directions to the tube 21 via support springs 32. In the case where a substrate S on the susceptor 23 is exchanged, the pedestal 33 is made to descend to introduce the susceptor 23 in the interior of a substrate exchange chamber 22 and the substrate S is vacuum-sucked by a finger arm 41 mounted on the tip of a robot arm 40.