| 摘要 |
PURPOSE:To provide an inexpensive sensor element and particle sensor excellent in detection accuracy and durability. CONSTITUTION:The sensor comprises a detecting section 20 including a ceramic piezoelectric film 22, a first electrode 24 covering the outer surface 22s thereof, and a second electrode 26 covering the inner surface 22t of the piezoelectric film 22, a ceramic oscillating section 14 mounting the detecting section 20, and a section 16 for securing the oscillating section 14 deg. that it can oscillate. The surface 14s of the oscillating section 14 is covered with the second electrode 26 and when the detecting section 20 or the oscillating section 14 is brought into contact with the particle in a fluid, the piezoelectric film 22 converts the oscillation state into an electric signal. |
