| 摘要 |
PURPOSE:To obtain a gas laser oscillating device wherein excellent laser oscillations can be obtained by a method wherein gas newly fed to a flow path of laser gas in a laser chamber is well mixed with existing gas, and well- mixed gas uniform and high in quality is supplied to a discharge electrode. CONSTITUTION:A laser gas flow path where laser gas is returned to a blower 3 circulating through the intermediary of the blower 3, a discharge electrode 2, and a heat exchanger 4 is provided inside a laser chamber 1 which is filled with laser gas and ring-shaped in cross section. A gas supply piping 5 is connected to a gas inlet 6 provided to the inner wall of the laser chamber 1 and located up the discharge electrode 2. The gas supply piping 5 is disposed making its tip protrude in the laser gas flow path 10. The axial end face of the gas supply piping 5 is blocked by a block plate 21, and 3 to 4 or more gas nozzles are provided to the circumferential side face of the piping 5 at an equal interval along a circumferential direction. |
