MICRO-MECHANICAL OSCILLATOR OF AN OSCILLATION GYROMETER

摘要

The invention proposes in a micro-mechanical oscillator of an oscillation gyrometer that the two masses oscillating in counter-phase connected via a coupling region be suspended on at least one suspension spring. The suspension springs are soft in the direction of oscillation and substantially harder in all other degrees of freedom. The torque resulting from the rate of rotation (absolute angular velocity) can thus be transmitted to the oscillating masses. Interference signals in the measurement of Coriolis forces are suppressed by subtraction. The oscillator is made of a semiconductor material and can be excited to oscillation in the electrostatic or electromagnetic field by suitable current leads.