| 摘要 |
<p>PURPOSE:To provide a measuring method and an apparatus to measure the deflection angle of a charged particle beam correctly and at high precision with no need of installing a detector in a sufficiently long distance to make it possible to neglect the length of the deflection region in the case the deflection angle of a charge particle beam is measured in an electric field or a magnetic field. CONSTITUTION:A deflecting region 14 of an electric field or a magnetic field, which is a subject to be measured, is set in a passing route of an electron beam 12 emitted out of an electron source 11 and a detector 15 which can shifted up and down by an actuator 16 is installed under the region. The deflection amounts delta1(s1), delta1(s2), and delta1(s3) of the electron beam 12 are measured at a plurality of detector positions s1, s2, s3 and the deflection angle deltatheta is computed based on these data.</p> |
